High precision pressurization / heating Gangbonder Specifications Stage size : 100 x 100 mm Die size : 1 x 1 mm to 20 x 20 mm Head-stage parallelism : ± 3 micron / 20 mm □ ± 20 micron / 100 mm □ Pressurized range : 100-5000N Heating range : Max 300 ℃ Nitrogen purge is possible